EUGENE A. IRENE
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Surfaces Interfaces and Films for Microelectronics

Surfaces Interfaces and Films for Microelectronics

4.00

Autor: Eugene A. Irene

Wydawnictwo: John Wiley Sons
ISBN: 9780470174470
Kategoria: Książki obcojęzyczne
The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET...
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