Surfaces Interfaces and Films for Microelectronics - Eugene A. Irene

Surfaces Interfaces and Films for Microelectronics
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Autor: Eugene A. Irene

 Wydawnictwo: John Wiley Sons
ISBN: 9780470174470
EAN:
Format: ...
Oprawa: twarda
Stron: 516
Data wydania: 2008-01-01
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The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.

Książka "Surfaces Interfaces and Films for Microelectronics"
Eugene A. Irene