Toshiaki Makabe; Zoran Lj. Petrovic

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TOSHIAKI MAKABE; ZORAN LJ. PETROVIC
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Plasma Electronics

Plasma Electronics

Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental...
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