Silicon Technologies Ion Implementation and Thermal Treatment - Annie Baudrant

Silicon Technologies Ion Implementation and Thermal Treatment

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Autor: Annie Baudrant

Wydawnictwo: ISTE Publishing Company
ISBN: 9781848212312
EAN:
Format: ...
Oprawa: twarda
Stron: 368
Data wydania: 2011-09-01
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The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

Książka "Silicon Technologies Ion Implementation and Thermal Treatment"
Annie Baudrant