EBOOK DIAGNOSTIC MEASUREMENTS IN LSI/VLSI INTEGRATED CIRCUITS PRODUCTION

This book describes means in improving the technology of LSI/VLSI ICs production. It does so by concentrating on improvements of manufacturing yield and quality of the products by detecting weak points which should be eliminated on the way up the learning curve. The book presents a systematic approach to the problem, covering primarily methods based on the use of test patterns measurements, in both mass production and in research and development activities. The main groups of defects found in IC chips and ways to detect them using test structures are discussed in detail.Contents:IntroductionYield in Integrated Circuits ProductionTest ChipsInvestigation of Functional Properties of Integrated Circuits Building BlocksInvestigation of Geometric Properties and Topographic ErrorsInvestigation of Structural DefectsDetermination of MOS Transistor ParametersMeasurements of MOS Capacitor ParametersDetermination of Semiconductor ParametersThe Measurement InstrumentationAppendicesReadership: Electrical and electronic engineers.Key Features:All the contributing authors are world-renowned experts in their respective fieldsThe co-authors of each chapter are paired such that both authors are from different but complementary specialties, thus bringing a fresh perspective to the topics discussedThis pairing approach will provide a unique and multidisciplinary contribution to this major field