Interlayer Dielectrics for Semiconductor Technologies
Opis
This book brings together for the first time the science and technology of Interlayer Dielectrics materials and associated processes in one volume, written by the experts in the field. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.